NANOPOTELEC : Measurement of the surface electric potential of operating devices
New Atomic Force Microscopy (AFM) based technic to accurately measure the surface electric potential profile of devices in their operating conditions (biased). It is a nondestructive process.
Measurements can be performed in ambient conditions, thanks to :
- Using a dual pass method (lift)
- Synchronizing of the device and tip biasing with second pass only
- Using a force gradient sensitive method (EFM phase shift)
Accurate and non-destructive method
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