MICRO POMPE: Ultra compact micro-pump for micrometric volumes

The innovation : Ultra compact MEMS micro pump:

The fluid is activated by the oscillations of a flexible polymer membrane.
Membrane oscillations are generated by an electronically controlled electromagnetic device.

This technology will generate flow rates in the order of µl/min for electricity consumption in the order of mW.

Benefits:

Compactness: the system has a total volume of 1 cm3
Very low energy consumption: 150 – 800 mW
Flow rate in the order of µl/min
Operation with different types of fluids and in several possible modes: suction or dosing
No friction, low vibration, low noise
Low cost and ease of integration

Engineering

NICT